Haenen, KenKenHaenenLazea, Ileana AndradaIleana AndradaLazeaMortet, V.V.MortetD'Haen, JanJanD'HaenGeithner, P.P.GeithnerRistein, J.J.Ristein2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13833Phosphorous doping of microcrystalline CVD diamond using modified conditionsProceedings paper