Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing

Sun, YitingYitingSunRomo Negreira, AinhoaAinhoaRomo NegreiraMeersschaut, JohanJohanMeersschautHoflijk, IlseIlseHoflijkVaesen, IngeIngeVaesenConard, ThierryThierryConardStruyf, HerbertHerbertStruyfTokei, ZsoltZsoltTokeiBoemmels, JuergenJuergenBoemmelsMoinpour, MansourMansourMoinpourDe Feyter, StevenStevenDe FeyterArmini, SilviaSilviaArmini2021-10-242021-10-2420170167-9317https://imec-publications.be/handle/20.500.12860/29526Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealingJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931716304439