Mechanical characterisation of poly-SiGe layers for CMOS-MEMS integrated applications

Modlinski, RobertRobertModlinskiWitvrouw, AnnAnnWitvrouwVerbist, AgnesAgnesVerbistPuers, BobBobPuersDe Wolf, IngridIngridDe Wolf2021-10-182021-10-1820100960-1317https://imec-publications.be/handle/20.500.12860/17646Mechanical characterisation of poly-SiGe layers for CMOS-MEMS integrated applicationsJournal articlehttp://www.iop.org/EJ/article/-alert=44438/0960-1317/20/1/015014/jmm10 1 01514.pdf