Eyben, PierrePierreEybenClarysse, TrudoTrudoClarysseMody, JayJayModyNazir, AftabAftabNazirSchulze, AndreasAndreasSchulzeHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-2020120038-1101https://imec-publications.be/handle/20.500.12860/20665Two-dimensional carrier mapping at the nanometerscale on 32nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopyJournal articlehttp://dx.doi.org/10.1016/j.sse.2011.10.023