AIN surface plasma treatment for selective diamond growth

Pobedinskas, PauliusPauliusPobedinskasFerraro, B.B.B.B.FerraroRuttens, BartBartRuttensConings, BertBertConingsD'Haen, JanJanD'HaenBoyen, Hans-GerdHans-GerdBoyenHaenen, KenKenHaenen2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22943AIN surface plasma treatment for selective diamond growthOral presentation