A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200° C

Hellin Rico, RaquelRaquelHellin RicoCelis, Jean-PierreJean-PierreCelisBaert, KrisKrisBaertVan Hoof, ChrisChrisVan HoofWitvrouw, AnnAnnWitvrouw2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12265A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200° CJournal article