Witvrouw, AnnAnnWitvrouwTilmans, HarrieHarrieTilmansBogaerts, LieveLieveBogaertsDe Moor, PietPietDe MoorBearda, TwanTwanBeardaHalder, SandipSandipHalderHaspeslagh, LucLucHaspeslaghSchlatmann, BartBartSchlatmannvan Bommel, MarkMarkvan Bommelde Nooijer, ChristineChristinede NooijerLauria, JohnJohnLauriaVanneer, RoelRoelVanneervan Drieenhuizen, BertBertvan Drieenhuizen2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16557Packaging of 11MPixel CMOS-integrated SiGe micro-mirror arraysProceedings paper