High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

Reading, M. A.M. A.Readingvan den Berg, J. A.J. A.van den BergZalm, P. C.P. C.ZalmArmour, D. G.D. G.ArmourBailey, P.P.BaileyNoakes, T. C. Q.T. C. Q.NoakesParisini, A.A.ParisiniConard, ThierryThierryConardDe Gendt, StefanStefanDe Gendt2021-10-182021-10-1820101071-1023https://imec-publications.be/handle/20.500.12860/17874High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layersJournal article