Thermal analysis of advanced back-end-of-line structures and the impact of design parameters

Chang, XinyueXinyueChangOprins, HermanHermanOprinsLofrano, MelinaMelinaLofranoVermeersch, BjornBjornVermeerschCiofi, IvanIvanCiofiVarela Pedreira, OlallaOlallaVarela PedreiraTokei, ZsoltZsoltTokeiDe Wolf, IngridIngridDe Wolf2024-01-022022-11-162024-01-022022-09-30978-1-6654-8502-92694-2135https://imec-publications.be/handle/20.500.12860/40747Thermal analysis of advanced back-end-of-line structures and the impact of design parametersProceedings paper10.1109/iTherm54085.2022.9899564978-1-6654-8503-6PhysicsBack-end-of-lineMaterial propertyVia densitybarrierFEMthermal modeling