Vaglio Pret, AlessandroAlessandroVaglio PretGronheid, RoelRoelGronheidEngelen, JanJanEngelenPei-Yang, YanYanPei-YangLeeson, MichaelMichaelLeesonYounkin, ToddToddYounkin2021-10-202021-10-202012-101094-4087https://imec-publications.be/handle/20.500.12860/21658Evidence of speckle in extreme-UV lithographyJournal articlehttp://www.opticsinfobase.org/oe/fulltext.cfm?uri=oe-20-23-25970&id=244877