Simple ultraviolet-based soft-lithography process for fabrication of low-loss polymer polysiloxanes-based waveguides

Teng, J.J.TengYan, H.H.YanLi, L.L.LiZhao, M.M.ZhaoZhang, H.H.ZhangMorthier, GeertGeertMorthier2021-10-192021-10-192011-121751-8768https://imec-publications.be/handle/20.500.12860/19876Simple ultraviolet-based soft-lithography process for fabrication of low-loss polymer polysiloxanes-based waveguidesJournal article