van Setten, EelcoEelcovan SettenPsara, EleniEleniPsaraWittebrood, FrisoFrisoWittebroodOorschot, DorotheDorotheOorschotvan Dijk, JoepJoepvan DijkSchiffelers, GuidoGuidoSchiffelersFinders, JoJoFindersDusa, MirceaMirceaDusaPhilipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickx2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26089Edge placement error analysis for N7 logic patterning optionsProceedings paper