Determination of the H-passivation build-up time in DHF treatments

Meuris, MarcMarcMeurisIzumi, H.H.IzumiKubo, K.K.KuboOjima, S.S.OjimaOhmi, T.T.OhmiHeyns, MarcMarcHeyns2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/765Determination of the H-passivation build-up time in DHF treatmentsProceedings paper