Hiblot, GaspardGaspardHiblotRassoul, NouredineNouredineRassoulTeugels, LieveLieveTeugelsDevriendt, KatiaKatiaDevriendtVaisman Chasin, AdrianAdrianVaisman Chasinvan Setten, MichielMichielvan SettenBelmonte, AttilioAttilioBelmonteDelhougne, RomainRomainDelhougneKar, Gouri SankarGouri SankarKar2022-03-112022-03-1120211541-7026WOS:000672563100110https://imec-publications.be/handle/20.500.12860/39421Process-induced charging damage in IGZO nTFTsProceedings paper10.1109/IRPS46558.2021.9405201978-1-7281-6893-7WOS:000672563100110PLASMA-INDUCED DAMAGEHYDROGENMECHANISM