Li, QiangQiangLiChen, ChengChengChenWang, MinggeMinggeWangLv, YaohuiYaohuiLvMao, YuluYuluMaoXu, ManzhangManzhangXuWang, YingnanYingnanWangWang, XuewenXuewenWangZhang, ZhiyongZhiyongZhangWang, ShouguoShouguoWangZhao, WuWuZhaoStiens, JohanJohanStiens2022-06-162022-01-022022-06-1620212238-7854WOS:000734275900002https://imec-publications.be/handle/20.500.12860/38705Study on photoelectricity properties of SiCN thin films prepared by magnetron sputteringJournal article10.1016/j.jmrt.2021.08.043WOS:000734275900002AMORPHOUS-SILICON