Popov, I.I.PopovVan Doorselaer, GeertGeertVan DoorselaerVan Calster, AndreAndreVan CalsterDe Smet, HerbertHerbertDe SmetCallens, F.F.CallensBoesman, E.E.Boesman2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2873Material aspects of a a-SiN:H based 2D direct X-ray sensor arrayProceedings paper