Integrated functional oxides in non-volatile memory devices

Muller, ChristopheChristopheMullerCourtade, LoreneLoreneCourtadeTurquat, Ch.Ch.TurquatMenou, NicolasNicolasMenouLisoni, JuditJuditLisoniGoux, LudovicLudovicGouxWouters, DirkDirkWoutersLamperti, A.A.LampertiSpiga, SabinaSabinaSpigaFanciulli, M.M.FanciulliGoguenheim, D.D.Goguenheim2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14197Integrated functional oxides in non-volatile memory devicesMeeting abstract