In-situ growth of Cu-Mn alloy self-forming barriers in 100 nm Cu/Low-k damascene interconnects

Wilson, ChrisChrisWilsonVolders, HennyHennyVoldersTokei, ZsoltZsoltTokeiCroes, KristofKristofCroesPantouvaki, MariannaMariannaPantouvakiBeyer, GeraldGeraldBeyerHorsfall, A.B.A.B.HorsfallO'Neill, A.G.A.G.O'Neill2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16547In-situ growth of Cu-Mn alloy self-forming barriers in 100 nm Cu/Low-k damascene interconnectsOral presentation