MOCVD of SBT from fluorine containing precursor system: microstructure optimization and fluorine elimination

Condorelli, G.G.G.G.CondorelliAnastasi, G.G.AnastasiBedoya, C.C.BedoyaFavazza, M.M.FavazzaBaeri, A.A.BaeriLo Nigro, R.R.Lo NigroMenou, N.N.MenouMuller, Ch.Ch.MullerLisoni, JuditJuditLisoniWouters, DirkDirkWoutersFragala, I.L.I.L.Fragala2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8717MOCVD of SBT from fluorine containing precursor system: microstructure optimization and fluorine eliminationOral presentation