A comb based in-plane SiGe capacitive accelerometer for above-IC integration

Wen, LianggongLianggongWenWouters, KristofKristofWoutersHaspeslagh, LucLucHaspeslaghWitvrouw, AnnAnnWitvrouwPuers, BobBobPuers2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18346A comb based in-plane SiGe capacitive accelerometer for above-IC integrationProceedings paper