Dultsev, F.N.F.N.DultsevUrbanowicz, AdamAdamUrbanowiczBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13681Plasma modification of Si-O-Si bond structure in porous SiOCH filmsProceedings paper