Besson, P.P.BessonBigot, C.C.BigotGrouillet, A.A.GrouilletJoly, J.P.J.P.JolyClaes, MartineMartineClaesBearda, TwanTwanBeardaFrickinger, J.J.Frickinger2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10092Management of metallic contamination in advanced IC manufacturingProceedings paper