Wang, ZiyangZiyangWangFiorini, PaoloPaoloFioriniLeonov, VladimirVladimirLeonovVan Hoof, ChrisChrisVan Hoof2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14777Characterization of poly-Si70%Ge30% for surface mIMECicromachined thermopilesProceedings paper