Favia, PaolaPaolaFaviaEneman, GeertGeertEnemanVeloso, AnabelaAnabelaVelosoHikavyy, AndriyAndriyHikavyyDe Keersgieter, AnAnDe KeersgieterHoriguchi, NaotoNaotoHoriguchiRichard, OlivierOlivierRichardBender, HugoHugoBender2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36706Tuning strain in nanosheet devicesMeeting abstract