Maestre Caro, ArantxaArantxaMaestre CaroZhao, LarryLarryZhaoMaes, GuidoGuidoMaesBorghs, GustaafGustaafBorghsBeyer, GeraldGeraldBeyerTokei, ZsoltZsoltTokeiArmini, SilviaSilviaArminiTravaly, YoussefYoussefTravaly2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17547High quality NH2SAM (Self Assembled Monolayer) diffusion barrier for advanced copper interconnectsProceedings paper