Numerical simulation of nano-indentation induced fracture of low-k dielectric thin films using cube corner indenter

Zahedmanesh, HoumanHoumanZahedmaneshVanstreels, KrisKrisVanstreelsGonzalez, MarioMarioGonzalez2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26227Numerical simulation of nano-indentation induced fracture of low-k dielectric thin films using cube corner indenterProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325630