On-wafer human metal model measurements for system-level ESD analysis

Scholz, MirkoMirkoScholzLinten, DimitriDimitriLintenThijs, StevenStevenThijsSawada, MasanoriMasanoriSawadaNakaei, T.T.NakaeiHasebe, TakumiTakumiHasebeLafonteese, DavidDavidLafonteeseVashchenko, VladislavVladislavVashchenkoVandersteen, GerdGerdVandersteenHopper, P.P.HopperGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182009-09https://imec-publications.be/handle/20.500.12860/16177On-wafer human metal model measurements for system-level ESD analysisMeeting abstract