In-device high resolution and high throughput optical metrology for process development and monitoring

Sah, KaushikKaushikSahLi, ShifangShifangLiDas, SayantanSayantanDasHalder, SandipSandipHalderCross, AndrewAndrewCross2022-01-132021-11-022022-01-1320201078-8743WOS:000631799000017https://imec-publications.be/handle/20.500.12860/37981In-device high resolution and high throughput optical metrology for process development and monitoringProceedings paper978-1-7281-5876-1WOS:000631799000017