Tierno, DavideDavideTiernoHosseini, MaryamMaryamHosseinivan der Veen, MarleenMarleenvan der VeenDangol, AnishAnishDangolCroes, KristofKristofCroesDemuynck, StevenStevenDemuynckTokei, ZsoltZsoltTokeiDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchi2022-06-092022-05-052022-05-102022-06-0920212380-632XWOS:000784773200053https://imec-publications.be/handle/20.500.12860/39742Proceedings paper10.1109/IITC51362.2021.9537545978-1-7281-7632-1WOS:000784773200053EngineeringBEOL, MOL, Reliability, Mo