The removal of organic contamination by O3/DI water processes: a theoretical study

De Smedt, FrankFrankDe SmedtVankerckhoven, HansHansVankerckhovenVinckier, ChrisChrisVinckierDe Gendt, StefanStefanDe GendtClaes, MartineMartineClaesHeyns, MarcMarcHeyns2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6215The removal of organic contamination by O3/DI water processes: a theoretical studyProceedings paper