Nonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extraction

Dortu, FabianFabianDortuBogdanowicz, JanuszJanuszBogdanowiczClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12095Nonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extractionJournal article