Proton formation and diffusion in amorphous SiNx:H

Dekkers, HaroldHaroldDekkersPrajapati, VictorVictorPrajapatiVan Elshocht, SvenSvenVan ElshochtVancoille, EricEricVancoille2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18821Proton formation and diffusion in amorphous SiNx:HProceedings paper10.1557/opl.2011.1252