Thermal stability of TiN/Ti/p+-Si0.3Ge0.7 contact with ultralow contact resistivity

Zhang, JianJianZhangYu, HaoHaoYuWang, LinlinLinlinWangSchaekers, MarcMarcSchaekersMocuta, DanDanMocutaHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertDe Meyer, KristinKristinDe MeyerJiang, Yu-longYu-longJiang2021-10-262021-10-2620180741-3106https://imec-publications.be/handle/20.500.12860/32369Thermal stability of TiN/Ti/p+-Si0.3Ge0.7 contact with ultralow contact resistivityJournal articlehttp://ieeexplore.ieee.org/document/8101525/