Fundamental Principles of Phase Shifting Masks by Fourier Optics: Theory and Experimental Verification

Ronse, KurtKurtRonseOp de Beeck, MaaikeMaaikeOp de BeeckVan den hove, LucLucVan den hoveEngelen, J.J.Engelen2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/315Fundamental Principles of Phase Shifting Masks by Fourier Optics: Theory and Experimental VerificationJournal article