NA/sigma optimisation strategies for an advanced DUV stepper applied to 0.25 mm and sub-0.25 mm critical levels

Op de Beeck, MaaikeMaaikeOp de BeeckRonse, KurtKurtRonseGhandehari, KourosKourosGhandehariJaenen, PatrickPatrickJaenenBotermans, HarryHarryBotermansFinders, JoJoFindersLilygren, JohnJohnLilygrenBaker, DanielDanielBakerVandenberghe, GeertGeertVandenbergheDe Bisschop, PeterPeterDe BisschopMaenhoudt, MireilleMireilleMaenhoudtVan den hove, LucLucVan den hove2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2081NA/sigma optimisation strategies for an advanced DUV stepper applied to 0.25 mm and sub-0.25 mm critical levelsProceedings paper