The effect of patterning options on embedded memory cells in logic technologies at iN10 and iN7

Appeltans, RafRafAppeltansWeckx, PieterPieterWeckxRaghavan, PraveenPraveenRaghavanKim, Ryan Ryoung hanRyan Ryoung hanKimKar, Gouri SankarGouri SankarKarFurnemont, ArnaudArnaudFurnemontVan der Perre, LiesbetLiesbetVan der PerreDehaene, WimWimDehaene2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27758The effect of patterning options on embedded memory cells in logic technologies at iN10 and iN7Proceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2613275