Tous, LoicLoicTousLerat, Jean-FrancoisJean-FrancoisLeratEmeraud, ThierryThierryEmeraudNegru, R.R.NegruHuet, K.K.HuetUruena De Castro, AngelAngelUruena De CastroAleman, MonicaMonicaAlemanRussell, RichardRichardRussellJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21628Nickel silicide formation using excimer laser annealingProceedings paper