Surface redeposition and damage due to focused ion beam milling

Bender, HugoHugoBenderFranquet, AlexisAlexisFranquetDrijbooms, ChrisChrisDrijboomsParmentier, BrigitteBrigitteParmentierVandervorst, WilfriedWilfriedVandervorstKwakman, LaurensLaurensKwakman2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/24984Surface redeposition and damage due to focused ion beam millingOral presentation