Dry passivation process for silicon heterojunction solar cells using hydrogen plasma treatment followed by in-situ a-Si:H deposition

Xu, MengleiMengleiXuWang, ChongChongWangBearda, TwanTwanBeardaSimoen, EddyEddySimoenSivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanGordon, IvanIvanGordonLi, WeiWeiLiSzlufcik, JozefJozefSzlufcikPoortmans, JefJefPoortmans2021-10-262021-10-2620182156-3381https://imec-publications.be/handle/20.500.12860/32313Dry passivation process for silicon heterojunction solar cells using hydrogen plasma treatment followed by in-situ a-Si:H depositionJournal articlehttps://ieeexplore.ieee.org/document/8478425