XRD investigation of the crystalline quality of Sn-doped β-Ga2O3 films deposited by the RF magnetron sputtering method

Kudou, JyunJyunKudouFunasaki, SuguruSuguruFunasakiTakahara, MotokiMotokiTakaharaTakakura, KenichiroKenichiroTakakuraOhyama, HidenoriHidenoriOhyamaNakashima, ToshiyukiToshiyukiNakashimaShibuya, MutsuoMutsuoShibuyaMurakami, KatsuyaKatsuyaMurakamiSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-202021-10-2020120255-5476https://imec-publications.be/handle/20.500.12860/20956XRD investigation of the crystalline quality of Sn-doped β-Ga2O3 films deposited by the RF magnetron sputtering methodJournal article