Jansen, HenriHenriJansenPamidighantam, SayanuSayanuPamidighantamDe Raedt, WalterWalterDe RaedtBeccarini, GiuseppeGiuseppeBeccariniDi Monaco, OrsolaOrsolaDi MonacoBaert, KrisKrisBaertTilmans, HarrieHarrieTilmans2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4448Micromachined devices for space telecom applicationsProceedings paper