Snoeckx, KoenKoenSnoeckxRooyackers, RitaRitaRooyackersJurczak, GosiaGosiaJurczakDixit, AbhisekAbhisekDixit2021-10-162021-10-162007-07https://imec-publications.be/handle/20.500.12860/12926Accurate fin patterning in emerging devices for 32nm and beyondJournal article