A detailed study of a novel wafer separation method for surface sensitive MEMS wafers

Malachowski, KarlKarlMalachowskiSeveri, SimoneSimoneSeveriVan Hoof, RitaRitaVan HoofSangameswaran, SandeepSandeepSangameswaranWitvrouw, AnnAnnWitvrouwGenda, SatoshiSatoshiGendaTabuchi, TomotakaTomotakaTabuchiUchiyama, NaokiNaokiUchiyama2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19360A detailed study of a novel wafer separation method for surface sensitive MEMS wafersOral presentation