Efremov, A. A.A. A.EfremovLitovchenko, V. G.V. G.LitovchenkoRomanova, G. P.G. P.RomanovaSarikov, A. V.A. V.SarikovClaeys, C.C.Claeys2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5278Carbon enhancement of SiO2 nucleation in buried oxide synthesisJournal article