Garaud, SylvainSylvainGaraudVos, RitaRitaVosShamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivMertens, PaulPaulMertensFransaer, JanJanFransaerDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13748Galvanic corrosion of stacked metal gate electrodes during cleaning in HF solutionsProceedings paper