Elevated co-silicide for sub-100nm high performance and RF CMOS

Jurczak, GosiaGosiaJurczakde Potter de ten Broeck, MurielMurielde Potter de ten BroeckRooyackers, RitaRitaRooyackersJeamsaksiri, WutthinanWutthinanJeamsaksiriRedolfi, AugustoAugustoRedolfiGrau, LluisLluisGrauLauwers, AnneAnneLauwersLindsay, RichardRichardLindsayPeytier, IvanIvanPeytierAugendre, EmmanuelEmmanuelAugendreBadenes, GonçalGonçalBadenes2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6457Elevated co-silicide for sub-100nm high performance and RF CMOSProceedings paper