Radisic, AlexAlexRadisicLuhn, OleOleLuhnVaes, JanJanVaesArmini, SilviaSilviaArminiEl-Mekki, ZaidZaidEl-MekkiRadisic, DunjaDunjaRadisicRuythooren, WouterWouterRuythoorenVereecken, PhilippePhilippeVereecken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17864Copper plating for 3d interconnectsProceedings paper