Quantification of group IV alloys in confined structures: the self focusing SIMS approach

Franquet, AlexisAlexisFranquetDouhard, BastienBastienDouhardMelkonyan, DavitDavitMelkonyanDelmotte, JorisJorisDelmotteDemeulemeester, JelleJelleDemeulemeesterConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23834Quantification of group IV alloys in confined structures: the self focusing SIMS approachMeeting abstract