Morphology and defects in shallow trench isolation structures

Stuer, CindyCindyStuerVan Landuyt, J.J.Van LanduytBender, HugoHugoBenderRooyackers, RitaRitaRooyackersBadenes, GonçalGonçalBadenes2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3867Morphology and defects in shallow trench isolation structuresProceedings paper