Epitaxial growth schemes for fin and Gate All Around devices

Loo, RogerRogerLooHikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelPorret, ClémentClémentPorretVohra, AnuragAnuragVohraLanger, RobertRobertLanger2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28853Epitaxial growth schemes for fin and Gate All Around devicesOral presentation